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DOI | 10.1126/science.aay8645 |
Nano-opto-electro-mechanical switches operated at CMOS-level voltages | |
Haffner, Christian1,2,3; Joerg, Andreas1; Doderer, Michael1; Mayor, Felix1,6,7; Chelladurai, Daniel1; Fedoryshyn, Yuriy1; Roman, Cosmin Ioan4; Mazur, Mikael5; Burla, Maurizio1; Lezec, Henri J.3; Aksyuk, Vladimir A.3; Leuthold, Juerg1 | |
2019-11-15 | |
发表期刊 | SCIENCE |
ISSN | 0036-8075 |
EISSN | 1095-9203 |
出版年 | 2019 |
卷号 | 366期号:6467页码:860-+ |
文章类型 | Article |
语种 | 英语 |
国家 | Switzerland; USA; Sweden |
英文摘要 | Combining reprogrammable optical networks with complementary metal-oxide semiconductor (CMOS) electronics is expected to provide a platform for technological developments in on-chip integrated optoelectronics. We demonstrate how opto-electro-mechanical effects in micrometer-scale hybrid photonic-plasmonic structures enable light switching under CMOS voltages and low optical losses (0.1 decibel). Rapid (for example, tens of nanoseconds) switching is achieved by an electrostatic, nanometer-scale perturbation of a thin, and thus low-mass, gold membrane that forms an air-gap hybrid photonic-plasmonic waveguide. Confinement of the plasmonic portion of the light to the variable-height air gap yields a strong opto-electro-mechanical effect, while photonic confinement of the rest of the light minimizes optical losses. The demonstrated hybrid architecture provides a route to develop applications for CMOS-integrated, reprogrammable optical systems such as optical neural networks for deep learning. |
领域 | 地球科学 ; 气候变化 ; 资源环境 |
收录类别 | SCI-E |
WOS记录号 | WOS:000496946200051 |
WOS关键词 | HIGH-SPEED ; WAVE-GUIDE ; SILICON ; SCALE ; MODULATOR ; TRANSDUCTION ; PLASMONICS ; COMPACT |
WOS类目 | Multidisciplinary Sciences |
WOS研究方向 | Science & Technology - Other Topics |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://119.78.100.173/C666/handle/2XK7JSWQ/226235 |
专题 | 环境与发展全球科技态势 |
作者单位 | 1.Swiss Fed Inst Technol, IEF, CH-8092 Zurich, Switzerland; 2.Univ Maryland, Inst Res Elect & Appl Phys, Maryland NanoCtr, College Pk, MD 20742 USA; 3.NIST, Phys Measurement Lab, Gaithersburg, MD 20899 USA; 4.Swiss Fed Inst Technol, Micro & Nanosyst, CH-8092 Zurich, Switzerland; 5.Chalmers Univ Technol, Dept Microtechnol & Nanosci, Photon Lab, Gothenburg, Sweden; 6.Stanford Univ, Dept Appl Phys, 348 Via Pueblo Mall, Stanford, CA 94305 USA; 7.Stanford Univ, Ginzton Lab, 348 Via Pueblo Mall, Stanford, CA 94305 USA |
推荐引用方式 GB/T 7714 | Haffner, Christian,Joerg, Andreas,Doderer, Michael,et al. Nano-opto-electro-mechanical switches operated at CMOS-level voltages[J]. SCIENCE,2019,366(6467):860-+. |
APA | Haffner, Christian.,Joerg, Andreas.,Doderer, Michael.,Mayor, Felix.,Chelladurai, Daniel.,...&Leuthold, Juerg.(2019).Nano-opto-electro-mechanical switches operated at CMOS-level voltages.SCIENCE,366(6467),860-+. |
MLA | Haffner, Christian,et al."Nano-opto-electro-mechanical switches operated at CMOS-level voltages".SCIENCE 366.6467(2019):860-+. |
条目包含的文件 | 条目无相关文件。 |
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