GSTDTAP  > 地球科学
DOI10.1126/science.aau5119
3D nanofabrication by volumetric deposition and controlled shrinkage of patterned scaffolds
Oran, Daniel1; Rodriques, Samuel G.1,2; Gao, Ruixuan1; Asano, Shoh1,3; Skylar-Scott, Mark A.4,5; Chen, Fei1,6; Tillberg, Paul W.1,7,11; Marblestone, Adam H.1; Boyden, Edward S.1,6,8,9,10
2018-12-14
发表期刊SCIENCE
ISSN0036-8075
EISSN1095-9203
出版年2018
卷号362期号:6420页码:1281-+
文章类型Article
语种英语
国家USA
英文摘要

Lithographic nanofabrication is often limited to successive fabrication of two-dimensional (2D) layers. We present a strategy for the direct assembly of 3D nanomaterials consisting of metals, semiconductors, and biomolecules arranged in virtually any 3D geometry. We used hydrogels as scaffolds for volumetric deposition of materials at defined points in space. We then optically patterned these scaffolds in three dimensions, attached one or more functional materials, and then shrank and dehydrated them in a controlled way to achieve nanoscale feature sizes in a solid substrate. We demonstrate that our process, Implosion Fabrication (ImpFab), can directly write highly conductive, 3D silver nanostructures within an acrylic scaffold via volumetric silver deposition. Using ImpFab, we achieve resolutions in the tens of nanometers and complex, non-self-supporting 3D geometries of interest for optical metamaterials.


领域地球科学 ; 气候变化 ; 资源环境
收录类别SCI-E
WOS记录号WOS:000452994400050
WOS关键词FABRICATION ; TRANSITION ; GELS ; DNA
WOS类目Multidisciplinary Sciences
WOS研究方向Science & Technology - Other Topics
引用统计
文献类型期刊论文
条目标识符http://119.78.100.173/C666/handle/2XK7JSWQ/200310
专题地球科学
资源环境科学
气候变化
作者单位1.MIT, Media Lab, Cambridge, MA 02139 USA;
2.MIT, Dept Phys, Cambridge, MA 02139 USA;
3.Pfizer Internal Med Res Unit, Cambridge, MA 02139 USA;
4.Harvard Univ, John A Paulson Sch Engn & Appl Sci, Cambridge, MA 02138 USA;
5.Wyss Inst Biol Inspired Engn, Cambridge, MA 02138 USA;
6.MIT, Dept Biol Engn, 77 Massachusetts Ave, Cambridge, MA 02139 USA;
7.MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA;
8.MIT, Dept Brain & Cognit Sci, E25-618, Cambridge, MA 02139 USA;
9.MIT, McGovern Inst, 77 Massachusetts Ave, Cambridge, MA 02139 USA;
10.MIT, Koch Inst, 77 Massachusetts Ave, Cambridge, MA 02139 USA;
11.Janelia Res Campus, Ashburn, VA 20147 USA
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GB/T 7714
Oran, Daniel,Rodriques, Samuel G.,Gao, Ruixuan,et al. 3D nanofabrication by volumetric deposition and controlled shrinkage of patterned scaffolds[J]. SCIENCE,2018,362(6420):1281-+.
APA Oran, Daniel.,Rodriques, Samuel G..,Gao, Ruixuan.,Asano, Shoh.,Skylar-Scott, Mark A..,...&Boyden, Edward S..(2018).3D nanofabrication by volumetric deposition and controlled shrinkage of patterned scaffolds.SCIENCE,362(6420),1281-+.
MLA Oran, Daniel,et al."3D nanofabrication by volumetric deposition and controlled shrinkage of patterned scaffolds".SCIENCE 362.6420(2018):1281-+.
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